The TEL Trias 200 SPA is a cluster tool for processing 300 mm wafers, available in dry etch and CVD configurations.
Cited variants
| Designation | Generation | Vintage | Changes | Source |
|---|
| TEL Trias 200 SPA (Dry Etch) | — | — | Configured as a dry etch cluster tool. | fabsurplus.com[1] |
| TEL Trias 200 SPA (CVD) | — | — | Configured as a CVD system. | fabsurplus.com[2] |