Tokyo Electron NS 300

Models in this family

1. NS 300

   The Tokyo Electron NS 300 is a scrubber used in semiconductor wet processing.

2. 

   NS 300 + Wafer

   Tokyo Electron NS 300 + Wafer Scrubber is a wet-process wafer scrubber for 8-inch wafers.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   NS 300+	—	—	8 chambers, 4 FOUP, 1 phase, chemicals TMY	Equipment inventory listing[1]

3. 

   NS 300 Z Wafer

   The Tokyo Electron NS 300 Z Wafer Scrubber is a 12-inch wafer scrubber with software version 6.00.26.2 and a 208 AC, 3-phase power rating.

Sources