Tokyo Electron Alpha 303

Models in this family

1. Alpha 303 i

   The Tokyo Electron Alpha 303 i is a furnace used for semiconductor thermal processes.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   Nitride	—	2005	—	Equipment inventory listing[1]

2. Alpha 303 i H

   The Tokyo Electron Alpha 303 i H is a 12-inch thermal/diffusion furnace produced in 2001.

3. 

   Alpha 303 i K

   The Tokyo Electron Alpha 303 i K is a 12-inch-wafer furnace in the Thermal / Diffusion category, documented in MTO and DCS-MTO configurations.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   Alpha 303 i K Furnace, 12" MTO	—	2002	—	Equipment inventory listing[2]
   Alpha 303 i K Furnace, 12" DCS-MTO	—	2009	—	Equipment inventory listing[3]
   Alpha 303 i K MTO	—	2002	—	Equipment inventory listing[2]
   Alpha 303 i K DCS-MTO	—	2009	—	Equipment inventory listing[3]

4. Alpha 303 i Vertical

   The Tokyo Electron Alpha 303 i is a vertical furnace designed for 12-inch (300 mm) wafers, available in TEOS, nitride, and cure configurations.

Sources