Tool family
Thermco 5200 Diffusion
Thermco 5200 Diffusion Furnace.
Models in this family
Thermco 5200 Diffusion Furnace is a thermal diffusion furnace with a 6-inch wafer size and a configurable two- to four-process chamber design.
Tool family
Thermco 5200 Diffusion Furnace.
Thermco 5200 Diffusion Furnace is a thermal diffusion furnace with a 6-inch wafer size and a configurable two- to four-process chamber design.
