Waferpedia

Tool family

Strasbaugh 6DE

StrasbaughCMP1 entry

The Strasbaugh 6DE is a multi-spindle grinder/polisher that uses a DC drive system and can be rebuilt.

Models in this family

  1. The Strasbaugh 6DE is a multi-spindle grinder/polisher that uses a DC drive system and can be rebuilt.

    Cited variants

    DesignationGenerationVintageChangesSource
    6DE-DC——DC drive systemexcelltechnology.com[1]

Sources

Sources (1)Every fact above is drawn from these public sources
  1. [1]excelltechnology.comexcelltechnology.com