SPTS MACS ICP

Models in this family

1. 

   MACS ICP

   The SPTS / STS MACS ICP is an 8-inch etcher with an HR chamber and cassette-to-cassette MACS loader.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   MACS ICP HR	—	2001	HR etch system variant; sources describe it as an HR dry etch system.	hommer.com.tw[1]

Sources