Waferpedia

Tool family

Rorze RR 700 L 150 Z 30

RorzeCMP1 entry

Models in this family

  1. The Rorze RR 700 L 150 Z 30 is a 6-inch single-arm tool compatible with AMAT Mirra Mesa CMP.

    Cited variants

    DesignationGenerationVintageChangesSource
    RR700L150-Z30-01——200mm wafer sizetarasemi.com[1]

Sources

Sources (1)Every fact above is drawn from these public sources
  1. [1]tarasemi.comtarasemi.com