Waferpedia

Tool family

Pfeiffer Turbomolecular Vacuum

Pfeiffer1 entry

Pfeiffer Turbomolecular Vacuum Pump System.

Models in this family

  1. The Pfeiffer Turbomolecular Vacuum Pump System is a turbomolecular vacuum pump system that includes a Pfeiffer TMU 071 P turbo pump, a Pfeiffer TC 600 turbo controller, a Pfeiffer PM Z01 253 cooling module, and a Balzers PCU 0200 power supply base.

    Cited variants

    DesignationGenerationVintageChangesSource
    SplitFlow 80 Neo———pfeiffervacuum.com[1]
    SplitFlow 350———pfeiffervacuum.com[1]

Sources

Sources (1)Every fact above is drawn from these public sources
  1. [1]pfeiffervacuum.compfeiffervacuum.com