Waferpedia

Tool family

Pfeiffer TPU 062 Turbomolecular Vacuum

Pfeiffer1 entry

Models in this family

  1. The Pfeiffer TPU 062 is a turbomolecular vacuum pump with a DN 63 CF-F inlet flange and a DN 16 ISO-KF outlet flange, offering a pumping speed of 56 liters per second for nitrogen and a final pressure of 1 x 10^-11.