Waferpedia

Tool family

Pfeiffer ACP28G

Pfeiffer1 entry

The Pfeiffer ACP28G is identified as the primary dry pump used in the loadlock pumping system of the EVA 451 evaporator.

Models in this family

  1. The Pfeiffer Adixen ACP28G is a compact dry rotary lobe vacuum pump designed for pumping traces of corrosive gas, featuring a frictionless multi-stage roots design and an integrated frequency converter.