Tool family
Nissin Exceed 3000 AH Implanter.
Cited variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| EXCEED3000AH-8C | — | — | described as a new 200mm tool; associated with improved throughput for 8 inch wafer fabrications | nccavs-usergroups.avs.org[1] |