Waferpedia

Tool family

MKS Vision 2000-P™

MKS1 entry

The MKS Vision 2000-P is a residual gas analyzer designed for select pressure and PVD processes, capable of detecting <100 ppb for most common gases.

Models in this family

  1. The MKS Vision 2000-P is a residual gas analyzer designed for select pressure and PVD processes, capable of detecting <100 ppb for most common gases.