Waferpedia

Tool family

MKS HPQ3

MKS1 entry

The MKS HPQ3 is a high-pressure residual gas analyzer with a maximum operating pressure of 0.001 Torr and a 1-100 amu mass range.

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Models in this family

  1. HPQ3

    The MKS HPQ3 is a high-pressure residual gas analyzer with a maximum operating pressure of 0.001 Torr and a 1-100 amu mass range.