Waferpedia

Tool family

Laurell WS-750Lz-23B

LaurellResist Processing1 entry

The Laurell WS-750Lz-23B is a spin coater in the 750 Series. The Laurell WS-750Lz-23B has a maximum substrate size of ø150mm (5" x 5") and a maximum speed of 12,000 rpm.

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Models in this family

  1. WS-750Lz-23B

    The Laurell WS-750Lz-23B is a spin coater in the 750 Series. The Laurell WS-750Lz-23B has a maximum substrate size of ø150mm (5" x 5") and a maximum speed of 12,000 rpm.