Waferpedia

Tool family

Lam Research SEZ DV 34

Lam ResearchEtch2 entries

Models in this family

  1. The Lam / SEZ DV 34 is a wafer processing tool that supports 8-inch and 12-inch wafer sizes.

  2. The Lam / SEZ DV 34 BF is a semiconductor etcher system with configuration options including 2 load ports and 4 chambers, with units manufactured between 2004 and 2010.

All entries

  1. SEZ DV 34Lam Research

    The Lam / SEZ DV 34 is a wafer processing tool that supports 8-inch and 12-inch wafer sizes.

    5 specs
  2. SEZ DV 34 BFLam Research

    The Lam / SEZ DV 34 BF is a semiconductor etcher system with configuration options including 2 load ports and 4 chambers, with units manufactured between 2004 and 2010.

    CategoryEtch
    4 specs