Lam Research Rainbow 4420

Models in this family

1. 

   Rainbow 4420

   The Lam Rainbow 4420 is a plasma etcher designed for 8-inch wafer processing, supporting poly etch and CMOS processes, and running Envision software.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   Rainbow 4420 Plasma Etcher, 8"	—	1994	8-inch wafer size; Envision 1.5 software; CIM SECS; process CMOS; Harmonics Arm (2); SMIF (2); LL Pump; TCU 2080; AC Rack; PC Pump; 208 volts.	Equipment inventory listing[1]

2. 

   Rainbow 4420 Polysilicon

   The Lam Rainbow 4420 Polysilicon Etcher is a cassette-to-cassette single wafer etcher for 6-inch wafers.

Sources