Waferpedia

Tool family

Lam Research IPEC 472

Lam ResearchCMP2 entries
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Models in this family

  1. IPEC 472

    The Lam / IPEC 472 is a chemical mechanical planarization (CMP) tool.

  2. IPEC 472 01001 Automatic Wafer

    The Lam / IPEC 472 01001 is an automatic wafer polisher.

All entries

  1. IPEC 472Lam Research

    The Lam / IPEC 472 is a chemical mechanical planarization (CMP) tool.

    CategoryCMP
    9 specs
  2. IPEC 472 01001 Automatic WaferLam Research

    The Lam / IPEC 472 01001 is an automatic wafer polisher.

    CategoryCMP
    4 specs