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Lam Research Exelan Flex
Tool family
Lam Research Exelan Flex
Lam Research
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Models in this family
Exelan Flex
Cited variants
Designation
Generation
Vintage
Changes
Source
2300 Exelan Flex FX
—
—
Described as chamber only and associated with dielectric etch.
macquarie.com
[1]
2300e4 Exelan Flex GX
—
2018
Described as a 2300e4 platform with Exelan Flex GX configuration.
macquarie.com
[2]
Sources
Sources (2)
Every fact above is drawn from these public sources
[1]
macquarie.com
macquarie.com
[2]
macquarie.com
macquarie.com