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Tool family

Lam Research 9400 SE Poly

Lam ResearchEtch1 entry

Lam Research 9400 SE Poly Etcher.

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Models in this family

  1. 9400 SE Poly

    The Lam Research 9400 SE Poly Etcher is a semiconductor etching system designed for poly-silicon processes.

    Cited variants

    DesignationGenerationVintageChangesSource
    Lam 9400 SE 308v———Equipment inventory listing[1]

Sources

Sources (1)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing