Waferpedia

Tool family

KLA SpectraCD 200

KLA3 entries
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Models in this family

  1. SpectraCD 200 Lamp Heat Sink
  2. SpectraCD 200 Lamp House Window
  3. SpectraCD 200 Wafer

    The KLA SpectraCD 200 is a wafer inspection system.

All entries

  1. SpectraCD 200 Lamp Heat SinkKLA
    1 spec
  2. SpectraCD 200 Lamp House WindowKLA
    1 spec
  3. SpectraCD 200 WaferKLA

    The KLA SpectraCD 200 is a wafer inspection system.

    CategoryMetrology & Inspection
    17 specs