Waferpedia

Tool family

KLA Altair 8920

KLAMetrology & Inspection2 entries
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Models in this family

  1. Altair 8920 Darkfield

    The KLA Altair 8920 is a darkfield inspection system for 8-inch wafers.

  2. Altair 8920 i Patterned Wafer Particle Defect

    The KLA Altair 8920 i is a patterned wafer particle defect system.

All entries

  1. Altair 8920 DarkfieldKLA

    The KLA Altair 8920 is a darkfield inspection system for 8-inch wafers.

    CategoryMetrology & Inspection
    6 specs
  2. Altair 8920 i Patterned Wafer Particle DefectKLA

    The KLA Altair 8920 i is a patterned wafer particle defect system.

    CategoryMetrology & Inspection
    7 specs