Tool family
The JDSU Off-Axis Green is a laser module compatible with the ASML PAS 5500 lithography system, identified by part number SERV 455 09864.
The JDSU Off-Axis Red is a laser compatible with ASML PAS 5500 lithography systems, identified by part numbers SERV 502 27023 and 4022 455 1663.
The JDSU Off-Axis Green is a laser module compatible with the ASML PAS 5500 lithography system, identified by part number SERV 455 09864.
The JDSU Off-Axis Red is a laser compatible with ASML PAS 5500 lithography systems, identified by part numbers SERV 502 27023 and 4022 455 1663.