Tool family
The Espec EHS-412(M) is a large highly accelerated stress test system for semiconductor testing. The EHS-412(M) operates at +105.0°C to +162.2°C, 75%rh to 100%rh, and 0.019 to 0.389 MPa (gauge).
The Espec EHS-412(M) is a large highly accelerated stress test system for semiconductor testing. The EHS-412(M) operates at +105.0°C to +162.2°C, 75%rh to 100%rh, and 0.019 to 0.389 MPa (gauge).
Cited variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| EHS-212(M) | — | — | Lower temperature, humidity, and pressure range than EHS-412(M), with interior dimensions φ294×L318mm. | espec.co.jp[1] |
| EHS-212MD | — | — | Two-stage version with interior dimensions φ294×L318mm ×2stage. | espec.co.jp[1] |
| EHS-222(M) | — | — | Different chamber size, with interior dimensions φ394×L426mm. | espec.co.jp[1] |
| EHS-222MD | — | — | Two-stage version with interior dimensions φ394×L426mm ×2stage. | espec.co.jp[1] |
| EHS-222M-L | — | — | Longer chamber with interior dimensions φ394×L626mm. | espec.co.jp[1] |
| EHS-412MD | — | — | Two-stage version with interior dimensions φ294×L318mm ×2stage. | espec.co.jp[1] |