Waferpedia

Tool family

Edwards IXL 120

Edwards1 entry

Models in this family

  1. The Edwards iXL120 is a low energy, compact dry pump system designed for clean duty applications.

    Cited variants

    DesignationGenerationVintageChangesSource
    iXL120N——Includes nitrogen purge system (N2 purge).manualslib.com[1]

Sources

Sources (1)Every fact above is drawn from these public sources
  1. [1]manualslib.commanualslib.com