Waferpedia

Tool family

Dektak 3030

The Dektak 3030 is listed as a surface profiler in the NanoLab metrology equipment inventory.

Models in this family

  1. The Dektak 3030 is a surface profiler used to measure surface topography, step height, and related profile features on solid materials. Machines of this class are used for direct, contact-based inspection of surface contours in laboratory and production environments.