Tool family

Axcelis Integra

Models in this family

Integra
The Axcelis Integra is an etch system for 12-inch wafers.
Cited variants
Designation Generation Vintage Changes Source
Integra ES Plasma Dry Strip — — ES Plasma Dry Strip variant; 3-phase, 50/60 Hz power. waferpedia.com^[1]

Designation	Generation	Vintage	Changes	Source
Integra ES Plasma Dry Strip	—	—	ES Plasma Dry Strip variant; 3-phase, 50/60 Hz power.	waferpedia.com^[1]

Sources (1)Every fact above is drawn from these public sources