ASM A 412 Dual Reactor

Models in this family

1. A 412 Dual Reactor

   The ASM A 412 Dual Reactor is a semiconductor processing tool used for deposition of nitride or doped polysilicon.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   A 412 Dual Reactor - Doped Poly	—	—	Configured for doped poly deposition	Equipment inventory listing[1]
   A 412 Dual Reactor - Nitride	—	—	Configured for nitride deposition	Equipment inventory listing[2]
   ASM A 412 Dual Reactor - Doped Poly	—	—	Configured for doped poly deposition	Equipment inventory listing[1]
   ASM A 412 Dual Reactor - Nitride	—	—	Configured for nitride deposition	Equipment inventory listing[2]

Sources