Applied Materials Vantage Vulcan RTP

Models in this family

1. Vantage Vulcan RTP

   Applied Materials Vantage Vulcan RTP is a rapid thermal process system with 2 chambers.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   Vantage Vulcan RTP System (Rapid Thermal Process) - 2 chambers - SA RTP (Co/Ni)	—	—	Specified as SA RTP (Co/Ni) and 2 chambers.	Equipment inventory listing[1]
   Vantage Vulcan RTP System (Rapid Thermal Process) - 2 chambers - Normal RTA/RTO	—	—	Specified as Normal RTA/RTO and 2 chambers.	Equipment inventory listing[2]
   Vantage Vulcan RTP System	—	—	Described in the sources with 2 chambers; one source specifies SA RTP (Co/Ni) and another specifies Normal RTA/RTO.	Equipment inventory listing[1]
   SA RTP (Co/Ni)	—	—	Configuration for SA RTP (Co/Ni) process	Equipment inventory listing[1]
   Normal RTA/RTO	—	—	Configuration for Normal RTA/RTO process	Equipment inventory listing[2]

Sources