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Comparison ledger

ATSS 130 15 15versus0332 F 9453 302 Diffusion

Thermotron ATSS 130 15 15, Varian 0332 F 9453 302 Diffusion, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
ATSS 130 15 15Thermotron
OEMThermotronVarian
CategoryThermal / DiffusionThermal / Diffusion
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyThermotron ATSS 130 15 15Varian 0332 F 9453 302 Diffusion
Specifications
ManufacturerThermotron[1]—
ModelATSS 130 15 15[1]—
CategoryThermal / Diffusion[2]—
Equipment typeThermal cycling and thermal shock chamber[3]—
Product familyAutomated Thermal Stress System (ATSS)[3]—
Temperature range, hot zone+25°C to +215°C (+77°F to +419°F)[3]—
Temperature range, cold zone-73°C to +180°C (-100°F to +356°F)[3]—
Temperature control tolerance+/-1.1°C (+/-2°F)[3]—
Transfer basket dimensions25 x 23 x 14.5 inches (63 x 58 x 37 centimeters)[3]—
Maximum weight capacity in basket100 lbs (45 kg)[3]—
Compressor size(2) 15 Hp Scroll Air-cooled[3]—
Airflow1,200 SCFM (33.9 cubic meters / minute)[3]—
Electrical requirements, full load amps, 460 / 3 / 6070[3]—
Electrical requirements, full load amps, 400 / 3 / 5080[3]—
Electrical requirements, full load amps, 230 / 3 / 60148[3]—
TypeThermal Cycling & Thermal Shock Chamber[3]—
Automated system nameAutomated Thermal Stress System (ATSS)[4]—
Hot zone temperature range+25°C to +215°C (+77°F to +419°F)[3]—
Cold zone temperature range-73°C to +180°C (-100°F to +356°F)[3]—
Approximate shipping weight2,400 lbs (1,088 kg)[3]—
Move-in dimensions49 x 83 x 83 inches (124 x 211 x 211 centimeters)[3]—
Electrical requirements at full load460 / 3 / 60: 70 amps; 400 / 3 / 50: 80 amps; 230 / 3 / 60: 148 amps[3]—
Controller8825 Controller[4]—
Controller screen size12-inch touchscreen[4]—
Zone controlBi-Directional Zone Control[4]—
Transfer mechanismRetractable transfer mechanism[4]—
Asset Number—142841[5]
Last Confirm Date—October 14, 2025[6]

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Sources (6)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]thermotron.comthermotron.com
  4. [4]docs.alltest.netdocs.alltest.net
  5. [5]Equipment inventory listing
  6. [6]fab-spares.comfab-spares.com