Comparison ledger
SUSS MicroTec 150 e Mask, Ultratech XLS 7500, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 150 e MaskSUSS MicroTec | XLS 7500Ultratech |
|---|---|---|
| OEM | SUSS MicroTec | Ultratech |
| Category | Lithography | Lithography |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | SUSS MicroTec 150 e Mask | Ultratech XLS 7500 |
| Specifications | ||
| Light source | — | i-line[1] |
| Resolution | — | 0.50 µm[1] |
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