Waferpedia

Comparison ledger

SS 3100versus1000FP

SCREEN SS 3100, YES 1000FP, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
SS 3100SCREEN
OEMSCREENYES
CategoryWet Processing / CleanWet Processing / Clean
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilySCREEN SS 3100YES 1000FP
Specifications
ManufacturerSCREEN / DNS[1]—
ModelSS 3100[1]Glen/YES 1000FP[4]
Equipment typeScrubber[1]—
Equipment categoryWet Processing / Clean[2]—
Example unit vintage2009[3]—
System type—Plasma cleaning system[4]
Line—R-Series Plasma Cleaning Systems (Glen Technologies)[4]
Designed use—Designed to accept a range of shelf sizes[4]
Application focus—Changing needs of the flat panel industry[4]

Plan your fab

Building a Wet Processing / Clean process? Get a complete equipment list.

Open the fab equipment planner →
Sources (4)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]Equipment inventory listing
  4. [4]web.archive.orgweb.archive.org