Comparison ledger
SCREEN FC 821, SCREEN FC 821 L, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | FC 821SCREEN | FC 821 LSCREEN |
|---|---|---|
| OEM | SCREEN | SCREEN |
| Category | Wet Processing / Clean | Wet Processing / Clean |
| Wafer size | — | Wafer Transfer Machine |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | SCREEN FC 821 | SCREEN FC 821 |
| Specifications | ||
| Configuration | Frame, 5 ch, 2 baths[1] | Carrier Transfer Robot[2] |
| Wafer Size | 8 inch[1] | — |
| Chambers | 5[1] | — |
| Baths | 2[1] | — |
| Vintage | 2020[1] | — |
| Process | — | SiGe[2] |
| Wafer size | — | Wafer Transfer Machine[2] |
| Current | — | 3 φ 200 V, 125 A[2] |
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