Comparison ledger
Oxford Instruments 100 ICP Fluorine, Plasma-Therm Unaxis Versaline ICP, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 100 ICP FluorineOxford Instruments | Unaxis Versaline ICPPlasma-Therm |
|---|---|---|
| OEM | Oxford Instruments | Plasma-Therm |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Oxford Instruments 100 ICP Fluorine | Plasma-Therm Unaxis Versaline ICP |
| Specifications | ||
| Etch Gases | SF6, CF4, O2, Ar, N2, CHF3, C4F8[1] | — |
| Cryo DRIE etch rate | up to 5 µm/min[1] | — |
| Wafer size | 4 inch, 6 inch, 8 inch (with clamp change)[1] | — |
| Process Chamber | — | 6" ESC Chuck Type[2] |
| ICP type | — | Inductively Coupled Plasma[2] |
| Includes | — | DSE III, Load Lock Chamber, Transfer Chamber, Process Chamber (6" ESC Chuck), RF Generator Module, Monitor Rack, Chiller Unit[2] |
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