Waferpedia

Comparison ledger

NSR S 207 Dversus1000 Family

Nikon NSR S 207 D, Ultratech 1000 Family, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
1000 FamilyUltratech
OEMNikonUltratech
CategoryLithographyLithography
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyNikon NSRUltratech 1000 Family
Cited variants
  • NSR S 207 D with Cymer laser[1]
  • NSR S 207 D with Gigaphoton laser[2]
  • NSR S 207 D with G41K2 Gigaphoton laser[3]
  • NSR S 207 D machine only[4]
  • Nikon NSR S 207 D with Cymer laser[1]
  • Nikon NSR S 207 D with Gigaphoton laser[2]
  • Nikon NSR S 207 D with Gigaphoton laser (second unit)[5]
  • Nikon NSR S 207 D with G41K2 Gigaphoton laser[3]
—
Specifications
ConfigurationWith Cymer laser[1]—
Laser source (variant)Cymer laser[1]—
OEMNikon[1]—
ModelNSR S 207 D[1]—
Equipment typeStepper[1]—
LaserCymer laser[1]—
Vintage2005[1]—
Last Confirm DateJuly 20, 2023[4]—
Tool type—Photolithography step-and-repeat 1X stepper[6]
Optical design—Wynne Dyson[6]
Magnification—1X[6]

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Sources (6)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]Equipment inventory listing
  3. [3]Equipment inventory listing
  4. [4]Equipment inventory listing
  5. [5]Equipment inventory listing
  6. [6]en.wikipedia.orgen.wikipedia.org