Comparison ledger
Lapmaster 12 Benchtop Lapping Polishing, Strasbaugh 6 EC CMP Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 12 Benchtop Lapping PolishingLapmaster | 6 EC CMP WaferStrasbaugh |
|---|---|---|
| OEM | Lapmaster | Strasbaugh |
| Category | CMP | CMP |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Lapmaster 12 Benchtop Lapping Polishing | Strasbaugh 6 EC CMP Wafer |
| Specifications | ||
| Make | Lapmaster[1] | Strasbaugh[6] |
| Model | 12[1] | 6 EC CMP[6] |
| Category | CMP[2] | — |
| Type/Application | Single sided[3] | — |
| Plate diameter | 12 in[3] | — |
| No. of conditioning rings | 3[4] | — |
| Configuration | Ring lapper[4] | — |
| Base | Rigid, lightweight, cast aluminum base[4] | — |
| Standard RPM | 60 RPM[4] | — |
| RPM range with variable speed drive | 0-60[4] | — |
| Drive motor - lapper | 0.5 HP[4] | — |
| Drive motor - polisher | 0.75 HP[4] | — |
| Length | 25 in[4] | — |
| Width | 18 in[4] | — |
| Height | 24 in[4] | — |
| Estimated shipping weight | 240 lbs[4] | — |
| Approximate weight | 135 lbs / 61 kg[5] | — |
| Approximate dimensions | 24.5 in × 17.5 in × 23.8 in (622 mm × 445 mm × 607 mm)[5] | — |
| Electrical system | Various voltages; 50/60 Hz; 1 phase and 3 phase to customer specification[5] | — |
| Motor | 1/3 hp / 0.25 kW motor with gear reducer[5] | — |
| Abrasive feed system | Designed for water or oil based lapping slurries[5] | — |
| Automatic cycle timer | Automatic digital cycle timer[5] | — |
| Ring configuration | Ring lapper[4] | — |
| Ring ID | 4.25 inches[4] | — |
| System type | — | CMP Wafer Polisher[6] |
| System description | — | Economical tool for CMP research, failure analysis, and low-volume production[7] |
| Operation | — | Semi-automatic[7] |
| GUI | — | Color, touch-screen GUI[7] |
| Table and spindle motors | — | Closed-loop table and spindle RPM motors[7] |
| Pad conditioning | — | Programmable pad conditioning[7] |
| Programmable control zones | — | 20 zones[7] |
| Programmable control parameters | — | Dwell time, down force, and RPM[7] |
| Pad conditioning media | — | Diamond plated disk or nylon brush[7] |
| Option | — | ViPRR carriers[7] |
| Asset # | — | 73620[6] |
| Operating mode | — | semi-automatic[7] |
| User interface | — | color, touch-screen GUI[7] |
| Process control zones | — | 20 zones of programmable control[7] |
| Facility utility requirements | — | DI Water: 30 psi minimum, 1.5 GPM flow rate; Vacuum: 25" HG; Air: 100 psi, 5 SCFM; Electrical: 208 or 230 VAC, 3 phase, 60 Hz, 20 AMPS with conditioner, 30 AMPS; Exhaust: approx. 100 CFM[7] |
| Pad conditioning tools | — | diamond plated disk or nylon brush[7] |
| Options | — | ViPRR carriers[7] |