Comparison ledger
Lam Research 2300 Selis, Tegal 1512e, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 2300 SelisLam Research | 1512eTegal |
|---|---|---|
| OEM | Lam Research | Tegal |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Lam Research 2300 Selis | Tegal 1512e |
| Cited variants |
| — |
| Specifications | ||
| OEM / manufacturer | Lam Research[2] | — |
| Model | 2300 Selis[2] | — |
| Equipment type | Etch chamber[2] | — |
| Category | Etch[3] | — |
| Wafer size | 12 inch[2] | — |
| Process / description | Dielectric Etch – Process Chamber[1] | — |
| Configuration | Chamber Only[1] | — |
| Version | 300 mm[1] | — |
| Tool type | — | Industrial RIE plasma etcher system[4] |
| Stated configuration | — | With modules assembly for CI-4222[4] |
Plan your fab
Building a Etch process? Get a complete equipment list.
Open the fab equipment planner →