Waferpedia

Comparison ledger

RS 75 TCAversus1070

KLA RS 75 TCA, Signatone 1070, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
1070Signatone
OEMKLASignatone
CategoryTest & ProbeTest & Probe
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA RS 75Signatone 1070
Specifications
Voltage115 V[1]—
Configuration1.8K Watts[2]—
ModelRS 75 TCA[2]1070[5]
MakeKLA[2]Signatone[5]
Power115 V, 1.8K Watts, 50/60 Hz[2]—
Frequency50/60 Hz[1]—
Wafer size6 inch, 8 inch[1]—
Wafer handling3 H type loader[1]—
TypeFour Point Probe (4PP)[4]—
Vintage1999-3[4]—
Tool typeFour-point probe (4PP)[4]—
ManufacturerKLA[1]—
CategoryTest & Probe[1]—
Equipment typeResistivity system[1]—
Probe head / loading3 H type loader[1]—
Wafer handler100 mm to 200 mm dual-cassette wafer handler[4]—
Flat finderIncluded[1]—

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Sources (5)Every fact above is drawn from these public sources
  1. [1]waferpedia.comwaferpedia.com
  2. [2]inventory listing
  3. [3]inventory listing
  4. [4]jenesisequipment.comjenesisequipment.com
  5. [5]Equipment inventory listing