Comparison ledger
KLA .498 PSL Wafer, KLA Surfscan 6100 Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | ||
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | Below Wafer |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA .498 PSL Wafer | KLA Surfscan |
| Specifications | ||
| Configuration | NIST Traceable[1] | 17A[2] |
| NIST traceability | Yes[1] | — |
| Phase | — | 1 Phase[2] |
| Frequency | — | 60 Hz[2] |
| Voltage | — | 208 V[2] |
| Wafer size | — | Below Wafer[2] |
| Detection | — | 0.16 micron on Bare Silicon[3] |
| Detection sensitivity | — | 0.16 micron on Bare Silicon[3] |
| Laser type | — | HeNe Red Laser[2] |
| Laser wavelength | — | 632 nm[2] |
| Power supply | — | 208 V, 17 A, 1 Phase, 60 Hz[2] |
| CPU speed | — | 800 MHz[2] |
| Storage type | — | Solid State Hard Drives[2] |
| Monitor type | — | LCD Color Monitor[2] |
| Detector type | — | PMT detector[2] |
| Computer interfaces | — | USB 2.0[3] |
Plan your fab
Building a Metrology & Inspection process? Get a complete equipment list.
Open the fab equipment planner →