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Comparison ledger

.204 PSL WaferversusImpulse 9010 T Integrated Metrology

KLA .204 PSL Wafer, Onto Innovation Impulse 9010 T Integrated Metrology, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMKLAOnto Innovation
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA .204 PSL WaferOnto Innovation Impulse 9010 T Integrated Metrology
Specifications
ConfigurationNIST Traceable[1]P/N 7000-039054 rev A[3]
Wafer Size8 inch[1]—
TraceabilityNIST[2]—
Compatible ToolsSurfscan 6xy0, Sp1[1]—
NIST TraceableYes[1]—
Part Number—7000-039054 rev A[3]
Voltage—100-240V[3]
Frequency—50/60Hz[3]
Frontend—Lynx[3]
Loadports—4[3]
Vintage—2013[3]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]inventory listing