Waferpedia

Comparison ledger

1007versus4060 Flying

KLA 1007, Spea 4060 Flying, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
1007KLA
OEMKLASpea
CategoryTest & ProbeTest & Probe
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA 1007Spea 4060 Flying
Specifications
ManufacturerKLA[1]—
Model1007[1]—
DescriptionWafer Prober[1]—
Wafer size150 mm[1]—
Convertible to 8 inch wafer sizeYes[1]—
Vintage01.06.1995[1]—
MakeKLA[2]—
Equipment typeProber[2]—
Configuration—4 Probes with Active Shield — reduces noise in high-precision analogue measurements (not standard)[3]
Double Booster—±40V/3A/100W + ±100V/1A/100W — for power component testing (IGBT, MOSFET, power devices)[3]
Full self-test—all systems PASS — zero errors[3]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]fabsurplus.comfabsurplus.com
  2. [2]Equipment inventory listing
  3. [3]inventory listing