Comparison ledger
KLA 1.112 PSL Wafer, Zeiss Leo 1530 FE-SEM, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Leo 1530 FE-SEMZeiss | |
|---|---|---|
| OEM | KLA | Zeiss |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 1.112 PSL Wafer | Zeiss LEO |
| Specifications | ||
| Configuration | NIST Traceable[1] | Four-Quadrant Backscattered Electron Detector (4QBSD)[3] |
| Wafer Size | 8 inch[1] | — |
| NIST Traceable | True[1] | — |
| Compatible Tools | Surfscan 6xy0 and Sp1[2] | — |
| OXFORD 6901 EDX Detector with resolution | — | 133 eV at 5.9 KeV[3] |
| Determination area | — | 10 mm²[3] |
| Detectors | — | Four-Quadrant Backscattered Electron Detector (4QBSD), E-T Detector, In-lens detector[3] |
| EDX Detector | — | OXFORD 6901 EDX Detector with resolution 133 eV at 5.9 KeV, determination area 10 mm²[3] |
| Resolution | — | Sub-nanometer[4] |
| Voltage Range | — | 0.2-30 kV[4] |
| Maximum Substrate Size | — | 6 inch[4] |
| Stage | — | Motorized x/y/z axes[4] |
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