Comparison ledger
KLA 1.112 PSL Wafer, KLA Zeta 20 3D, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Zeta 20 3DKLA | |
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 1.112 PSL Wafer | KLA Zeta 20 3D |
| Specifications | ||
| Configuration | NIST Traceable[1] | — |
| Wafer Size | 8 inch[1] | — |
| NIST Traceable | True[1] | — |
| Compatible Tools | Surfscan 6xy0 and Sp1[2] | — |
| Type | — | 3D laser microscope[3] |
| Imaging / metrology capability | — | 3D imaging and metrology capability[4] |
| Measurement capabilities | — | dimensional and roughness information[4] |
| Optics source | — | high intensity white light LED source[4] |
| Z-drive resolution | — | sub-micron level resolution[4] |
| Lowest objective mentioned | — | 20x[4] |
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