Comparison ledger
KLA 0035235-003 MMD Head, KLA 2367 Brightfield, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | ||
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 0035235-003 MMD Head | KLA 2367 |
| Specifications | ||
| Configuration | TSTD PCB ASSY, MMD MEAS HEAD[1] | ORS Upgrade[2] |
| Model | 0035235-003[1] | 2367 Brightfield[2] |
| Make | KLA[1] | — |
| Part Description | TSTD PCB ASSY, MMD MEAS HEAD[1] | — |
| Compatible System | KLA AIT-XP[1] | — |
| Power Requirements | — | 208 V, 16 A, 50 / 60 Hz, 3 Phase[2] |
| CE Marked | — | Yes[2] |
| OEM | — | KLA[2] |
| Category | — | Metrology & Inspection[3] |
| Description | — | brightfield inspection system[3] |
| Wafer support | — | 200 mm cassettes[2] |
| Cassette HW | — | 25 cassette HW 200 mm[2] |
| Model support | — | GEM/SECS and HSMS[2] |
| Pixels enabled | — | .12, .62, .39[2] |
| Vintage | — | 2017[2] |
Plan your fab
Building a Metrology & Inspection process? Get a complete equipment list.
Open the fab equipment planner →