Comparison ledger
Karl Suss MJB-3, Ultratech 1000 Family, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | MJB-3Karl Suss | 1000 FamilyUltratech |
|---|---|---|
| OEM | Karl Suss | Ultratech |
| Category | Lithography | Lithography |
| Wafer size | 3" | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Karl Suss MJB-3 | Ultratech 1000 Family |
| Specifications | ||
| OEM | Karl Suss[1] | — |
| Model | MJB-3[1] | — |
| Type | Contact/proximity aligner[1] | — |
| Illumination wavelengths | 365 nm or 405 nm[1] | — |
| Resists | Used with a variety of both positive and negative photoresists[1] | — |
| Location | FabLab | Teaching Lab[1] | — |
| Maximum substrate diameter | up to 3"[1] | — |
| Sample compatibility | works for smaller samples[1] | — |
| Light options | 365 nm or 405 nm light[1] | — |
| Photoresist compatibility | a variety of both positive and negative photoresists[1] | — |
| Tool type | — | Photolithography step-and-repeat 1X stepper[2] |
| Optical design | — | Wynne Dyson[2] |
| Magnification | — | 1X[2] |
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