Comparison ledger
Hitachi 1305 BSG 3, SVG 8620 Dual Track Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 1305 BSG 3Hitachi | |
|---|---|---|
| OEM | Hitachi | SVG |
| Category | Wet Processing / Clean | Wet Processing / Clean |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Hitachi 1305 BSG 3 | SVG 8620 Dual Track Wafer |
| Specifications | ||
| Configuration | — | Double Sided[1] |
| Manufacturer | — | SVG[2] |
| Model | — | 8620[2] |
| Equipment type | — | Dual Track Wafer Scrubber[2] |
| Wafer size | — | 4 inch[2] |
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