Comparison ledger
Heller 1088, YES 3TA, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 1088Heller | 3TAYES |
|---|---|---|
| OEM | Heller | YES |
| Category | Thermal / Diffusion | Thermal / Diffusion |
| Wafer size | — | 4 in, 5-6 in, 8 in, 12 in |
| Process node | — | — |
| Introduced | — | 1980 |
| Production run | — | 1980– |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Heller 1088 | YES 3TA |
| Cited variants | — | |
| Specifications | ||
| Heating Zones | 8 zones (4 top and 4 below) plus 1 cooling zone[2] | — |
| Heating Method | Forced convection[2] | — |
| Conveyor Width | 18 inches (45 cm)[2] | — |
| Heated Length | 43.5 inches (111 cm)[2] | — |
| Overall Length | 96 inches (244 cm)[2] | — |
| Height | 50 inches (127 cm)[2] | — |
| Net Weight | 900 lbs (409 kg)[2] | — |
| Thermal Profiler | Included[2] | — |
| Oven Top | Counter balance for easy access to conveyor[2] | — |
| Solder Compatibility | Lead-free and leaded soldering[2] | — |
| Model | — | YES-3TA[3] |
| Category | — | Vacuum Bake / Vapor Prime Systems[3] |
| Capacity | — | 8 cassettes of 4-inch wafers, or 1 cassette of 5-8 inch wafers[1] |
| Cleanliness | — | less than 10x1 micron particles per 4-inch wafer[1] |
| Throughput | — | 2 full loads/hr[1] |
| HMDS usage | — | <4 ml/200 wafers (120 prime cycles/pint)[1] |
| Temperature | — | 160°C max[1] |
| Process type | — | Vacuum Bake / Vapor Prime[1] |
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