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Comparison ledger

Profilm3Dversus05 LHP 151

Filmetrics Profilm3D, Melles Griot 05 LHP 151, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
Profilm3DFilmetrics
05 LHP 151Melles Griot
OEMFilmetricsMelles Griot
CategoryPrecision OpticsPrecision Optics
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyFilmetrics Profilm3DMelles Griot 05
Cited variants
  • Profilm3D-200[1]
—
Specifications
manufacturerFilmetrics[2]—
modelProfilm3D[2]—
instrument typeoptical profiler[2]—
measurement methodprofilometry[2]—
step-height accuracy0.7% for an 8 µm step[2]—
maximum silicon thickness stated on source page for tabletop/mapping/production systemsup to 2 mm thick[2]—
Configuration—With 05 LPL 340 Power Supply (Does not power on)[3]
Equipment type—Laser[3]
Make—Melles Griot[3]
Model—05 LHP 151[3]
Power state—Does not power on[3]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]kla.comkla.com
  2. [2]web.archive.orgweb.archive.org
  3. [3]inventory listing
  4. [4]waferpedia.comwaferpedia.com