Comparison ledger
EV Group 101, Perkin Elmer Micralign, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 101EV Group | MicralignPerkin Elmer |
|---|---|---|
| OEM | EV Group | Perkin Elmer |
| Category | Lithography | Lithography |
| Wafer size | — | 2-inch, 2.5-inch, or 3-inch wafers; optionally 4×4-inch, 3.5×3.5-inch, or 3×3-inch masks |
| Process node | — | — |
| Introduced | — | 1973 |
| Production run | — | 1971–1990 |
| Lifecycle | — | Discontinued |
| Lifecycle milestones | — | 1990 Divestiture |
| Control system | — | — |
| Generation | — | — |
| Family | EV Group 101 | Perkin Elmer Micralign |
| Cited variants | — | |
| Specifications | ||
| OEM | EV Group[2] | Perkin-Elmer[1] |
| Model | 101[2] | — |
| Equipment name | EVG 101 Spray Coater[2] | — |
| NEMO ID | evgspraycoat[2] | — |
| Training required | EVG 101 Training[2] | — |
| Training duration | 1.50 hours[2] | — |
| Processing technique | Resist Spray Coat (manual)[2] | — |
| Cleanliness | "All"[2] | — |
| Location | SNF Paul G Allen L107 Cleanroom[2] | — |
| Wafer diameter (substrate size) | up to 300 mm[3] | — |
| Available modules | Spin coat / OmniSpray® / develop[3] | — |
| Wafer handling options | Bowed / warped / thin wafer handling, edge handling[3] | — |
| Dispense options | Various resist dispense pumps covering viscosities up to 52000 cP; constant pressure dispense systems; EBR / BSR / pre-wet / bowl wash / liquid priming[3] | — |
| Processing technique (at SNF) | Resist Spray Coat (manual)[4] | — |
| Cleanliness group (at SNF) | "All"[2] | — |
| Model family | — | Micralign[1] |
| Type | — | projection aligner[1] |
| Introduction year | — | 1973[1] |
| First sold model | — | Micralign 100[1] |
| First sold | — | 1973[1] |
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