Comparison ledger
EV Group 101, OAI 200, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 101EV Group | 200OAI |
|---|---|---|
| OEM | EV Group | OAI |
| Category | Lithography | Lithography |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | EV Group 101 | OAI 200 |
| Specifications | ||
| OEM | EV Group[1] | OAI[4] |
| Model | 101[1] | 200[4] |
| Equipment name | EVG 101 Spray Coater[1] | — |
| NEMO ID | evgspraycoat[1] | — |
| Training required | EVG 101 Training[1] | — |
| Training duration | 1.50 hours[1] | — |
| Processing technique | Resist Spray Coat (manual)[1] | — |
| Cleanliness | "All"[1] | — |
| Location | SNF Paul G Allen L107 Cleanroom[1] | Bay B[5] |
| Wafer diameter (substrate size) | up to 300 mm[2] | — |
| Available modules | Spin coat / OmniSpray® / develop[2] | — |
| Wafer handling options | Bowed / warped / thin wafer handling, edge handling[2] | — |
| Dispense options | Various resist dispense pumps covering viscosities up to 52000 cP; constant pressure dispense systems; EBR / BSR / pre-wet / bowl wash / liquid priming[2] | — |
| Processing technique (at SNF) | Resist Spray Coat (manual)[3] | — |
| Cleanliness group (at SNF) | "All"[1] | — |
| Tool owner | — | Brian Baker[4] |
| Serial number | — | 1213[4] |
| Substrate size accommodation | — | up to 6"x6"[6] |
| Mask size accommodation | — | 2"x2" to 7"x7"[6] |
| Maximum mask size (datasheet) | — | up to 9"x9"[7] |
| Alignment precision | — | 1 micron[8] |
| Vacuum Chuck X, Y travel | — | ±0.47" (12mm)[6] |
| Vacuum Chuck Z travel | — | ±0.12" (3mm)[6] |
| Vacuum Chuck rotation | — | ±7°[6] |
| Substrate Stage X, Y travel (datasheet) | — | ±10mm[7] |
| Z travel (datasheet) | — | 1500 microns[7] |
| Rotation (datasheet) | — | ±3.5°[7] |
| Lamp power range | — | 200W to 2000W[8] |
| UV wavelength range | — | Near or Deep UV (220nm to 436nm)[6] |
| Exposure intensity control | — | ±2% of desired intensity[8] |
| Timer range | — | 0-1000 seconds in 1 second intervals[6] |
| Dimensions (width) | — | 31 inches[6] |
| Dimensions (height) | — | 37 inches (datasheet: 37")[7] |
| Weight | — | 250 lbs[7] |
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