Waferpedia

Comparison ledger

1034versusEG5

Electroglas 1034, Electroglas EG5, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
1034Electroglas
EG5Electroglas
OEMElectroglasElectroglas
CategoryTest & ProbeTest & Probe
Wafer size—150mm
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyElectroglas 1034Electroglas EG5
Cited variants—
Specifications
Product line—EG5|300[1]
Variant—ARGOS[1]
Description—Electroglas' highest accuracy 300mm wafer prober[1]
Probe-to-pad accuracy—±2.5 micron[1]
Stepping accuracy—1.0 micron[1]
Wafer sizes handled—150mm, 200mm, and 300mm wafers[1]
Variant description—Fine-pitch probing for in-line parametric test structures[1]
Tool type—wafer prober[1]
Accuracy positioning—probe-to-pad accuracy of ±2.5 micron[1]
Handled wafer sizes—150mm, 200mm, 300mm[1]
Model relation—EG5|300e is a fine-pitch probing model for in-line parametric test structures[1]

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Sources (1)Every fact above is drawn from these public sources
  1. [1]web.archive.orgweb.archive.org